Title :
A gas-liquid separated in-plane swing-mode resonator with high Q-factor in solution for real-time bio-sensing
Author :
Yu, H.T. ; Chen, Y. ; Xu, P.C. ; Xu, T.G. ; Bao, Y.Y. ; Li, X.X.
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
High Q-factor is achieved in liquid by using an in-plane swing-mode micro-resonator that is specific-designed with a gas-liquid separated structure. Such a resonator can be used for long-term operation in solution for real-time bio-detection. With design of an anti-leakage narrow `hydrophobic-slit´ to protect the resonator still in air for high-Q vibration, while only the sensing-region of the device contacts the analyte solution. In addition, the in-plane vibrated resonator works in a swing-mode that helps to gain high-Q by largely decreasing liquid damping. Q=162 has been experimentally achieved in water for the resonator. With the polyclonal antibody (pAb) immobilized at the sensing-region, the sensor experimentally realizes liquid-phase real-time detection to E.coli DH5α in PBS solution.
Keywords :
Q-factor; biosensors; cellular biophysics; damping; micromechanical resonators; microorganisms; microsensors; molecular biophysics; proteins; E.coli DH5α; PBS solution; Q-factor; antileakage narrow hydrophobic-slit; gas-liquid separated in-plane swing-mode microresonator; gas-liquid separated structure; high-Q vibration; in-plane vibrated resonator; liquid damping; liquid-phase real-time detection; polyclonal antibody; real-time biodetection; real-time biosensor; resonator still; Chemicals; DH-HEMTs; Liquids; Media; Q-factor; Real-time systems; Sensors; MEMS; Q factor; bio-sensor; in-plane mode; liquid sensing; resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181245
