Title :
Versatile fabrication of PDMS-carbon electrodes for silicone dielectric elastomer transducers
Author :
Araromi, O.A. ; Rosset, S. ; Shea, H.R.
Author_Institution :
Microsyst. for Space Technol. Lab. (LMTS), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
We report a novel method for the fabrication of polydimethylsiloxane (PDMS)-carbon composite electrodes for silicone dielectric elastomer transducers. The methodology combines patterning by laser ablation and oxygen plasma induced bonding, producing stretchable and flexible devices with exceptional electrode adhesion and high mechanical robustness. The methodology also offers great flexibility in the size and scale of electrode designs; we demonstrate this in the fabrication of flexible bending actuators > 10 cm long and interdigitated capacitive sensors with micro-scale features.
Keywords :
adhesion; capacitive sensors; carbon; composite materials; dielectric materials; elastomers; flexible electronics; laser ablation; microsensors; plasma applications; silicones; transducers; C; PDMS; carbon composite electrodes; electrode adhesion; electrode designs; flexible bending actuators; interdigitated capacitive sensors; laser ablation; mechanical robustness; oxygen plasma; polydimethylsiloxane; silicone dielectric elastomer transducers; Actuators; Bonding; Dielectrics; Electrodes; Plasmas; Robot sensing systems; Dielectric elastomer actuators; dielectric elastomer sensor; flexible bending actuators; stretchable devices;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181323