Title :
A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Author :
Ebermann, M. ; Neumann, N. ; Binder, S. ; Meinig, M. ; Seifert, M. ; Kurth, S. ; Hiller, K.
Author_Institution :
InfraTec GmbH, Dresden, Germany
Abstract :
A new fast infrared microspectrometer based on a MEMS tunable Fabry-Pérot filter (μFPF) is reported. In contrast to previous designs the acquisition time for a complete spectrum is decreased 50 times and the spectral resolution is improved 3 times. This is achieved by the use of higher interference orders and the combination with a room temperature operated PbSe photodetector. Such a system will be especially useful for the measurement of hydrocarbon gases in the spectral range of (3.1...3.8) μm. The μFPF is tuned sinusoidally over the entire wavelength range in about 100 ms. Methods for offset elimination and drift compensation were developed as well.
Keywords :
IV-VI semiconductors; gas sensors; infrared spectrometers; lead compounds; microsensors; optical filters; optical tuning; photodetectors; MEMS tunable Fabry-Perot filter; PbSe; drift compensation; fast MEMS infrared microspectrometer; hydrocarbon gases measurement; interference orders; offset elimination; photodetector; spectral resolution; temperature 293 K to 298 K; Band-pass filters; Detectors; Hydrocarbons; Micromechanical devices; Optical filters; Signal to noise ratio; Wavelength measurement; MEMS Fabry-Pérot filter; PbSe photodetector; drift compensation; hydrocarbon gases; offset elimination;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181356
