DocumentCode
732030
Title
Pull-in voltage and fabrication yield analysis for fixed-fixed beam nanoelectromechanical switches
Author
You Qian ; Bowoon Soon ; Zhuolin Xiang ; Chengkuo Lee
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2015
fDate
21-25 June 2015
Firstpage
2121
Lastpage
2124
Abstract
A statistical study has been done for all-metal-based laterally actuated nanoelectromechanical switch. 500 devices with 50 different dimensions have been characterized in terms of pull-in voltage and fabrication yield. An analytical solution to predict the pull-in voltage with only 2% deviation compared to finite element modeling is developed. Switches of robust designs show 100% fabrication yield and repeatable switching behavior.
Keywords
finite element analysis; nanoelectromechanical devices; switches; finite element modeling; fixed-fixed beam nanoelectromechanical switches; laterally actuated nanoelectromechanical switch; Etching; Fabrication; Logic gates; Metals; Nanoelectromechanical systems; Surface cleaning; Voltage measurement; Nanoelectromechanical System (NEMS); fabrication yield; pullin voltage; switch;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location
Anchorage, AK
Type
conf
DOI
10.1109/TRANSDUCERS.2015.7181377
Filename
7181377
Link To Document