Title :
Pull-in voltage and fabrication yield analysis for fixed-fixed beam nanoelectromechanical switches
Author :
You Qian ; Bowoon Soon ; Zhuolin Xiang ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A statistical study has been done for all-metal-based laterally actuated nanoelectromechanical switch. 500 devices with 50 different dimensions have been characterized in terms of pull-in voltage and fabrication yield. An analytical solution to predict the pull-in voltage with only 2% deviation compared to finite element modeling is developed. Switches of robust designs show 100% fabrication yield and repeatable switching behavior.
Keywords :
finite element analysis; nanoelectromechanical devices; switches; finite element modeling; fixed-fixed beam nanoelectromechanical switches; laterally actuated nanoelectromechanical switch; Etching; Fabrication; Logic gates; Metals; Nanoelectromechanical systems; Surface cleaning; Voltage measurement; Nanoelectromechanical System (NEMS); fabrication yield; pullin voltage; switch;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181377
