Large dynamic range time domain measurement of Q-factor in MEMS

Author

Voigt, S. ; Freitag, M. ; Sorger, A. ; Mehner, J.E.

Author_Institution

Tech. Univ. Chemnitz, Chemnitz, Germany

fYear

2015

fDate

21-25 June 2015

Firstpage

2180

Lastpage

2183

Abstract

The experimental identification of the quality factor in MEMS is a challenging task regarding signal processing and interpretation. Using logarithmic amplification some benefits regarding the signal processing and the reliability of the results can be achieved. This paper reports on two logarithmic amplification methods which allow an easy to use resource efficient measurement of the quality factor in MEMS. The logarithmic behavior enables the measurement of movement amplitude dependent quality factor in one measurement window. A rectifying amplifier and a full logarithmic amplifier are described and measurement examples are shown.

Keywords

Q-factor measurement; amplifiers; micromechanical devices; MEMS; dynamic range time domain measurement; full logarithmic amplifier; logarithmic amplification; movement amplitude dependent quality factor; rectifying amplifier; resource efficient measurement; signal processing; Damping; Frequency-domain analysis; Micromechanical devices; Q-factor; Resonant frequency; Time-domain analysis; MEMS; damping; logarithmic amplifier; measurement; quality factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181392

Filename

7181392