Title :
Characterization and modelling of differential sensitivity of nanoribbon-based pH-sensors
Author :
Scarbolo, P. ; Accastelli, E. ; Pittino, F. ; Ernst, T. ; Guiducci, C. ; Selmi, L.
Author_Institution :
DIEGM, Univ. of Udine, Udine, Italy
Abstract :
We report accurate characterization, modelling and simulation of SOI nanoribbon-based pH sensors and we compare operation in air (dry) and electrolyte (wet) environments. We find remarkably different current density distributions and geometry scaling rules, but similar series resistances and active trap state densities in the two configurations. Calibrated TCAD based simulations implementing an original approach to model the site-binding charge, and in good agreement with experiments, provide the necessary insights to interpret the non trivial dependence of the threshold voltage and current sensitivity on pH.
Keywords :
calibration; chemical sensors; current density; current distribution; electrolytes; elemental semiconductors; nanoribbons; nanosensors; pH measurement; silicon; silicon-on-insulator; technology CAD (electronics); SOI nanoribbon-based pH sensor; Si; TCAD based simulation; active trap state density; calibration; current density distribution; differential sensitivity; electrolyte; geometry scaling rule; series resistance; site-binding charge; Atmospheric modeling; Logic gates; Sensitivity; Sensors; Silicon; Threshold voltage; Voltage measurement; TCAD simulation; characterization; modelling; nanoribbon; nanowire; pH sensor; series resistance;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181394