Flexible Sputter-Deposited Carbon Strain Sensor

Author

Tata, Uday ; Hung Cao ; Nguyen, Cuong M. ; Jung-Chih Chiao

Author_Institution

Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA

Volume

13

Issue

2

fYear

2013

fDate

Feb. 2013

Firstpage

444

Lastpage

445

Abstract

In this letter, we report a piezoresistive amorphous carbon strain sensor fabricated on a flexible polyimide substrate. Amorphous carbon was sputter-deposited onto a 125-μm-thick polyimide film and the strain gauges were tailored using laser micromachining. The strain sensors were tested by using a cantilever setup to obtain sensitivity, hysteresis, repeatability, and dynamic response. Gauge factors in the range of 6-9 have been achieved.

Keywords

amorphous state; cantilevers; carbon; dynamic response; hysteresis; laser beam machining; micromachining; microsensors; piezoresistive devices; polymer films; sputter deposition; strain gauges; strain sensors; thick film sensors; C; cantilever; dynamic response; flexible polyimide substrate; flexible sputter deposition; gauge factor; hysteresis; laser micromachining; piezoresistive amorphous carbon strain sensor; repeatability; sensor sensitivity; size 125 mum; strain gauge; thick polyimide film; Carbon; Polyimides; Robot sensing systems; Sensitivity; Strain; Substrates; Temperature measurement; Amorphous carbon; flexible substrate; gauge factor; polyimide and strain sensor;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2012.2229563

Filename

6359741