Title :
Microfabrication of ion trap platforms with integrated optics and three-dimensional electrodes
Author :
Dugan, Mark A. ; Schenck, Chris ; Said, Ali A.
Author_Institution :
Translume, Ann Arbor, MI, USA
Abstract :
We discuss a laser-based process to fabricate three-dimensional electromagnetic microtraps on silica platforms. Design flexibility for extended electrode geometries with a high degree of optical access and components integration is supported by this fabrication process.
Keywords :
integrated optics; micro-optics; microfabrication; optical elements; optical fabrication; particle traps; electrode geometry; integrated optics; ion trap platforms; laser-based process; microfabrication; optical access; optical component integration; silica platforms; three-dimensional electrodes; three-dimensional electromagnetic microtraps; Charge carrier processes; Electrodes; Optical surface waves; Silicon compounds; Surface cleaning; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
