DocumentCode
732454
Title
Microfabrication of ion trap platforms with integrated optics and three-dimensional electrodes
Author
Dugan, Mark A. ; Schenck, Chris ; Said, Ali A.
Author_Institution
Translume, Ann Arbor, MI, USA
fYear
2015
fDate
10-15 May 2015
Firstpage
1
Lastpage
2
Abstract
We discuss a laser-based process to fabricate three-dimensional electromagnetic microtraps on silica platforms. Design flexibility for extended electrode geometries with a high degree of optical access and components integration is supported by this fabrication process.
Keywords
integrated optics; micro-optics; microfabrication; optical elements; optical fabrication; particle traps; electrode geometry; integrated optics; ion trap platforms; laser-based process; microfabrication; optical access; optical component integration; silica platforms; three-dimensional electrodes; three-dimensional electromagnetic microtraps; Charge carrier processes; Electrodes; Optical surface waves; Silicon compounds; Surface cleaning; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
7182884
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