Title :
Excimer laser annealing for LTPS on large glass substrates
Author_Institution :
Coherent LaserSystems GmbH & Co. KG, Goettingen, Germany
Abstract :
Low-Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high-resolution AMLCDs. Progress on Excimer Laser Annealing towards large-scale production of LTPS is described.
Keywords :
LED displays; excimer lasers; laser beam annealing; silicon; AMOLED displays; LTPS; backplane technology; excimer laser annealing; glass substrates; high-resolution AMLCD; large-scale production; low-temperature polycrystalline silicon; Annealing; Circuit stability; Laser beams; Laser stability; Optical beams; Oscillators; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
