• DocumentCode
    732533
  • Title

    High power laser-sustained plasma lightsources for KLA-Tencor broadband inspection tools

  • Author

    Bezel, I. ; Delgado, G. ; Derstine, M. ; Gross, K. ; Solarz, R. ; Shchemelinin, A. ; Shortt, D.

  • Author_Institution
    Technol. Group, KLA-Tencor Corp, Milpitas, CA, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    For the last 8 years, the brightness of UV lightsources in KT Broadband inspection tools increased by orders of magnitude due to advances in LSP technology. Challenges of LSP in high-power regime are discussed here.
  • Keywords
    light sources; optical testing; plasma sources; KLA-Tencor broadband inspection tools; LSP technology; brightness; high power laser-sustained plasma light sources; Brightness; Broadband communication; Inspection; Optical pumping; Plasma temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7182966
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=732533