• DocumentCode
    732617
  • Title

    Improving electron microscopy by shaping the electron beam wavefunction

  • Author

    Mutzafi, Maor ; Kaminer, Ido ; Harari, Gal ; Segev, Mordechai

  • Author_Institution
    Phys. Dept., Solid-State Inst., Technion - Israel Inst. of Technol., Haifa, Israel
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We show a novel technique to enhance resolution and SNR in electron microscopes-by shaping the quantum wavefunction of electrons. Our technique overcomes fundamental limits that currently set the resolution and SNR in electron microscopy.
  • Keywords
    electron beams; electron microscopy; electron optics; wave functions; SNR; electron beam wavefunction shaping; electron microscopy; electron quantum wavefunction shaping; Electron beam applications; Scanning electron microscopy; Shape; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7183052
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=732617