Title :
Improving electron microscopy by shaping the electron beam wavefunction
Author :
Mutzafi, Maor ; Kaminer, Ido ; Harari, Gal ; Segev, Mordechai
Author_Institution :
Phys. Dept., Solid-State Inst., Technion - Israel Inst. of Technol., Haifa, Israel
Abstract :
We show a novel technique to enhance resolution and SNR in electron microscopes-by shaping the quantum wavefunction of electrons. Our technique overcomes fundamental limits that currently set the resolution and SNR in electron microscopy.
Keywords :
electron beams; electron microscopy; electron optics; wave functions; SNR; electron beam wavefunction shaping; electron microscopy; electron quantum wavefunction shaping; Electron beam applications; Scanning electron microscopy; Shape; Transmission electron microscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
