Title :
Experimental demonstration of CMOS-compatible longrange dielectric-loaded surface plasmon-polariton waveguides (LR-DLSPPWs)
Author :
Zektzer, Roy ; Desiatov, Boris ; Mazurski, Noa ; Bozhevolnyi, Sergey I. ; Levy, Uriel
Author_Institution :
Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem, Israel
Abstract :
We demonstrate the design, fabrication and experimental characterization of long-range dielectric-loaded surface plasmon-polariton waveguides (LR-DLSPPWs) that are compatible with complementary metal-oxide semiconductor (CMOS) technology. The demonstrated waveguides feature good mode confinement together with long propagation at telecom wavelengths.
Keywords :
CMOS integrated circuits; integrated optics; optical design techniques; optical fabrication; optical losses; optical waveguides; polaritons; surface plasmons; CMOS-compatible LR-DLSPPW; complementary metal-oxide semiconductor technology; long propagation; long-range dielectric-loaded surface plasmon-polariton waveguides; mode confinement; propagation loss; telecom wavelengths; waveguide design; waveguide fabrication; Metals; Optical device fabrication; Optical surface waves; Optical waveguides; Plasmons; Strips; Surface waves;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
