• DocumentCode
    733583
  • Title

    Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching

  • Author

    Kaiyuan Wang ; Edwards, Chris ; Srivastava, Shailendra N. ; Goddard, Lynford L.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Digital projection photochemical etching is a novel single-step process for fabricating customized gray-scale semiconductor structures. Several features including a variable height pyramid array are fabricated, demonstrating the resolution, range, accuracy, and dynamics of the technique.
  • Keywords
    etching; optical arrays; optical fabrication; optical projectors; photochemistry; dynamic digital projection photochemical etching; gray-scale semiconductor structure fabrication; variable height pyramid array; Arrays; Etching; Fabrication; Gallium arsenide; Gray-scale; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184024
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733583