Title :
Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching
Author :
Kaiyuan Wang ; Edwards, Chris ; Srivastava, Shailendra N. ; Goddard, Lynford L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
Digital projection photochemical etching is a novel single-step process for fabricating customized gray-scale semiconductor structures. Several features including a variable height pyramid array are fabricated, demonstrating the resolution, range, accuracy, and dynamics of the technique.
Keywords :
etching; optical arrays; optical fabrication; optical projectors; photochemistry; dynamic digital projection photochemical etching; gray-scale semiconductor structure fabrication; variable height pyramid array; Arrays; Etching; Fabrication; Gallium arsenide; Gray-scale; Surface topography;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
