Title :
Ultra-high Q silicon resonators in planarized LOCOS
Author :
Naiman, Alex ; Desiatov, Boris ; Stern, Liron ; Mazurski, Noa ; Shappir, Joseph ; Levy, Uriel
Author_Institution :
Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem, Israel
Abstract :
We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3·10) silicon resonators, with nearly fully planar interface for multilayer silicon integration.
Keywords :
Q-factor; integrated optics; optical fabrication; optical multilayers; optical resonators; oxidation; silicon; Si; modified local oxidation; multilayer silicon integration; optical waveguide fabrication; planarized LOCOS; ultra-high quality factor silicon resonators; Fabrication; Optical resonators; Optical waveguides; Photonics; Q-factor; Silicon; Silicon nitride;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
