Title :
Photonic damascence process for high-Q SiN microresonator fabrication for nonlinear photonics
Author :
Pfeiffer, M.H.P. ; Kordts, A. ; Brasch, V. ; Lecaplain, C. ; Jost, J.D. ; Geiselmann, M. ; Kippenberg, T.J.
Author_Institution :
Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland
Abstract :
Integrated microresonators based on SiN waveguides are an attractive platform for nonlinear optics. Here we present a new photonic Damascene fabrication process that solves common problems in SiN waveguide fabrication and demonstrate frequency comb formation.
Keywords :
integrated optics; micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical frequency combs; optical resonators; optical waveguides; silicon compounds; SiN; frequency comb formation; high-Q SiN microresonator fabrication; integrated microresonators; nonlinear photonics; photonic damascence fabrication process; waveguides; Dispersion; Fabrication; Microcavities; Optical waveguides; Photonics; Resonant frequency; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
