• DocumentCode
    733586
  • Title

    Photonic damascence process for high-Q SiN microresonator fabrication for nonlinear photonics

  • Author

    Pfeiffer, M.H.P. ; Kordts, A. ; Brasch, V. ; Lecaplain, C. ; Jost, J.D. ; Geiselmann, M. ; Kippenberg, T.J.

  • Author_Institution
    Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Integrated microresonators based on SiN waveguides are an attractive platform for nonlinear optics. Here we present a new photonic Damascene fabrication process that solves common problems in SiN waveguide fabrication and demonstrate frequency comb formation.
  • Keywords
    integrated optics; micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical frequency combs; optical resonators; optical waveguides; silicon compounds; SiN; frequency comb formation; high-Q SiN microresonator fabrication; integrated microresonators; nonlinear photonics; photonic damascence fabrication process; waveguides; Dispersion; Fabrication; Microcavities; Optical waveguides; Photonics; Resonant frequency; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184027
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733586