• DocumentCode
    733597
  • Title

    Enhanced coupling in Si3N4 slot-mode optomechanical crystals via stress tuning

  • Author

    Grutter, Karen E. ; Davanco, Marcelo ; Srinivasan, Kartik

  • Author_Institution
    Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate Si3N4 slot-mode optomechanical crystals with optical Qs up to 1.65 × 105 and mechanical frequencies around 3.4 GHz. Tensile stress tunes gap widths down to 24 nm, enhancing coupling and enabling radiation-pressure-driven self-oscillation.
  • Keywords
    photonic crystals; piezo-optical effects; radiation pressure; silicon compounds; Si3N4; Si3N4 slot-mode optomechanical crystals; enhanced coupling; frequency 3.4 GHz; gap widths; mechanical frequencies; optical Qs; radiation-pressure-driven self-oscillation; stress tuning; tensile stress; Crystals; Optical beams; Optical coupling; Optical design; Optical device fabrication; Optical imaging;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184038