DocumentCode
733597
Title
Enhanced coupling in Si3 N4 slot-mode optomechanical crystals via stress tuning
Author
Grutter, Karen E. ; Davanco, Marcelo ; Srinivasan, Kartik
Author_Institution
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
2015
fDate
10-15 May 2015
Firstpage
1
Lastpage
2
Abstract
We demonstrate Si3N4 slot-mode optomechanical crystals with optical Qs up to 1.65 × 105 and mechanical frequencies around 3.4 GHz. Tensile stress tunes gap widths down to 24 nm, enhancing coupling and enabling radiation-pressure-driven self-oscillation.
Keywords
photonic crystals; piezo-optical effects; radiation pressure; silicon compounds; Si3N4; Si3N4 slot-mode optomechanical crystals; enhanced coupling; frequency 3.4 GHz; gap widths; mechanical frequencies; optical Qs; radiation-pressure-driven self-oscillation; stress tuning; tensile stress; Crystals; Optical beams; Optical coupling; Optical design; Optical device fabrication; Optical imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
7184038
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