• DocumentCode
    733752
  • Title

    Si3N4 multilayer platform for photonic integrated circuits

  • Author

    Kuanping Shang ; Pathak, Shibnath ; Binbin Guan ; Guangyao Liu ; Chuan Qin ; Scott, Ryan P. ; Yoo, S.J.B.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, Davis, Davis, CA, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We design, fabricate, and demonstrate an optimized silicon nitride multilayer platform including ultra-low interlayer vertical coupling loss of 0.05 dB, multilayer crossing loss of 0.265 dB at 90° crossing angle, and 50 μm bending radius.
  • Keywords
    integrated optoelectronics; optical design techniques; optical fabrication; optical losses; optical multilayers; optical waveguides; silicon compounds; Si3N4; bending radius; crossing angle; multilayer crossing loss; multilayer waveguides; photonic integrated circuits; silicon nitride multilayer platform; ultralow interlayer vertical coupling loss; Couplers; Couplings; Nonhomogeneous media; Optical losses; Optical waveguides; Silicon; Waveguide discontinuities;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184194
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733752