• DocumentCode
    733815
  • Title

    Broadband mid-infrared frequency comb generation in a Si3N4 microresonator

  • Author

    Luke, Kevin ; Okawachi, Yoshitomo ; Lamont, Michael R. E. ; Gaeta, Alexander L. ; Lipson, Michal

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate broadband frequency comb generation in the mid-infrared from 2.3 to 3.5 μm in a Si3N4 microresonator with Q=850,000 fabricated using an optimized process for decreasing intrinsic losses and overcoming stress limitations.
  • Keywords
    micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical frequency combs; optical losses; optical resonators; silicon compounds; Si3N4; broadband mid-infrared frequency comb generation; intrinsic losses; microresonator; stress limitations; wavelength 2.3 mum to 3.5 mum; Absorption; Annealing; Dispersion; Films; Optical ring resonators; Resonant frequency; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184257