DocumentCode
733815
Title
Broadband mid-infrared frequency comb generation in a Si3 N4 microresonator
Author
Luke, Kevin ; Okawachi, Yoshitomo ; Lamont, Michael R. E. ; Gaeta, Alexander L. ; Lipson, Michal
Author_Institution
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
fYear
2015
fDate
10-15 May 2015
Firstpage
1
Lastpage
2
Abstract
We demonstrate broadband frequency comb generation in the mid-infrared from 2.3 to 3.5 μm in a Si3N4 microresonator with Q=850,000 fabricated using an optimized process for decreasing intrinsic losses and overcoming stress limitations.
Keywords
micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical frequency combs; optical losses; optical resonators; silicon compounds; Si3N4; broadband mid-infrared frequency comb generation; intrinsic losses; microresonator; stress limitations; wavelength 2.3 mum to 3.5 mum; Absorption; Annealing; Dispersion; Films; Optical ring resonators; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
7184257
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