Title :
193nm Lithography fabricated high sensitivity photonic crystal microcavity biosensors for plasma protein detection in patients with pancreatic cancer
Author :
Chun-Ju Yang ; Naimei Tang ; Hai Yan ; Chakravarty, Swapnajit ; Donghui Li ; Chen, Ray T.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
High sensitivity L13-type two-dimensional photonic crystal microcavities with nanoholes were fabricated by 193nm photolithography. 0.03 picomolar concentration pancreatic cancer biomarker in patient serum samples was experimentally detected to 10× lower dilution than ELISA.
Keywords :
bioMEMS; biomedical equipment; biosensors; cancer; micro-optomechanical devices; microcavities; microfabrication; microsensors; molecular biophysics; nanomedicine; nanophotonics; nanosensors; optical fabrication; photolithography; photonic crystals; proteins; high sensitivity L13-type two-dimensional photonic crystal microcavity; lithography fabricated high sensitivity photonic crystal microcavity biosensors; nanoholes; pancreatic cancer patients; patient serum samples; photolithography; picomolar concentration pancreatic cancer biomarker; plasma protein detection; wavelength 193 nm; Cancer; Microcavities; Photonic crystals; Plasmas; Proteins; Sensitivity; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
