193nm Lithography fabricated high sensitivity photonic crystal microcavity biosensors for plasma protein detection in patients with pancreatic cancer

Author

Chun-Ju Yang ; Naimei Tang ; Hai Yan ; Chakravarty, Swapnajit ; Donghui Li ; Chen, Ray T.

Author_Institution

Electr. & Comput. Eng. Dept., Univ. of Texas at Austin, Austin, TX, USA

fYear

2015

fDate

10-15 May 2015

Firstpage

1

Lastpage

2

Abstract

High sensitivity L13-type two-dimensional photonic crystal microcavities with nanoholes were fabricated by 193nm photolithography. 0.03 picomolar concentration pancreatic cancer biomarker in patient serum samples was experimentally detected to 10× lower dilution than ELISA.

Keywords

bioMEMS; biomedical equipment; biosensors; cancer; micro-optomechanical devices; microcavities; microfabrication; microsensors; molecular biophysics; nanomedicine; nanophotonics; nanosensors; optical fabrication; photolithography; photonic crystals; proteins; high sensitivity L13-type two-dimensional photonic crystal microcavity; lithography fabricated high sensitivity photonic crystal microcavity biosensors; nanoholes; pancreatic cancer patients; patient serum samples; photolithography; picomolar concentration pancreatic cancer biomarker; plasma protein detection; wavelength 193 nm; Cancer; Microcavities; Photonic crystals; Plasmas; Proteins; Sensitivity; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics (CLEO), 2015 Conference on

Conference_Location

San Jose, CA

Type

conf

Filename

7184262