Title :
Scaling zero-change photonics: An active photonics platform in a 32nm microelectronics SOI CMOS process
Author :
Wade, Mark T. ; Pavanello, Fabio ; Orcutt, Jason ; Kumar, Rajesh ; Shainline, Jeffrey M. ; Stojanovic, Vladimir ; Ram, Rajeev ; Popovic, Milos A.
Author_Institution :
Dept. of Electr., Comput., & Energy Eng., Univ. of Colorado, Boulder, CO, USA
Abstract :
We demonstrate photonics monolithically integrated in a 32 nm SOI microelectronics process, including grating couplers, tunable filters, and modulators, the first migration of zero-change CMOS photonics moving down the microelectronics technology-node ladder, from the 45nm node.
Keywords :
CMOS integrated circuits; diffraction gratings; integrated optoelectronics; optical couplers; optical filters; optical modulation; optical tuning; silicon-on-insulator; active photonics platform; grating couplers; microelectronics SOI CMOS process; microelectronics technology-node ladder; modulators; monolithically integrated photonics; size 32 nm; size 45 nm; tunable filters; zero-change photonics scaling; Gratings; Microelectronics; Modulation; Optical device fabrication; Optical filters; Optical waveguides; Photonics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
