The estimation of IC wafers structural defects density with functional parameters

Method for estimation of structural defects density over whole wafer area by parametric wafer map creation is considered. This technique allows fast and accurate estimation of defects density over wafer area and in wafer batch. Input offset voltage of operational amplifer (op-amp) is calculated as a function of structural defects density and an example of corresponding parametric map is shown. The opportunity to localize the origin of structural defects on technological route is discussed.