• DocumentCode
    736166
  • Title

    Development of effectively test chamber for SnCl2 gas detection sensor

  • Author

    Hashim, U. ; Zaki, M. ; Arshad, M.K.Md ; Ayub, R.M. ; Fathil, M.F.M. ; Azman, A.H. ; Adzhri, R.

  • Author_Institution
    School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP) Perlis, Malaysia
  • fYear
    2015
  • fDate
    30-31 March 2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper presents the development of gas chamber for testing and characterization of gases with different concentrations. By using glass as the chamber material, it able to provide strong and air-tight structure and prevent odor chemical gases from leaking which can effect the environment. The glass chamber also enables easy monitoring (from the external) of the hardware connections, to ensure that they are always intact and in good condition. The measurement plate in the chamber consists of a copper probe, sensor, heater and conductor. A temperature within the range of 200 °C to 300 °C is required to activate the sensing mechanism. Initial testing shows that the chamber provides well enclose environment for gases detection.
  • Keywords
    Glass; Heating; Semiconductor device measurement; Temperature measurement; Temperature sensors; Voltage measurement; Gas chamber; Gas detection; metal oxide sensing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Biomedical Engineering (ICoBE), 2015 2nd International Conference on
  • Conference_Location
    Penang, Malaysia
  • Type

    conf

  • DOI
    10.1109/ICoBE.2015.7235900
  • Filename
    7235900