DocumentCode
736166
Title
Development of effectively test chamber for SnCl2 gas detection sensor
Author
Hashim, U. ; Zaki, M. ; Arshad, M.K.Md ; Ayub, R.M. ; Fathil, M.F.M. ; Azman, A.H. ; Adzhri, R.
Author_Institution
School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP) Perlis, Malaysia
fYear
2015
fDate
30-31 March 2015
Firstpage
1
Lastpage
4
Abstract
This paper presents the development of gas chamber for testing and characterization of gases with different concentrations. By using glass as the chamber material, it able to provide strong and air-tight structure and prevent odor chemical gases from leaking which can effect the environment. The glass chamber also enables easy monitoring (from the external) of the hardware connections, to ensure that they are always intact and in good condition. The measurement plate in the chamber consists of a copper probe, sensor, heater and conductor. A temperature within the range of 200 °C to 300 °C is required to activate the sensing mechanism. Initial testing shows that the chamber provides well enclose environment for gases detection.
Keywords
Glass; Heating; Semiconductor device measurement; Temperature measurement; Temperature sensors; Voltage measurement; Gas chamber; Gas detection; metal oxide sensing;
fLanguage
English
Publisher
ieee
Conference_Titel
Biomedical Engineering (ICoBE), 2015 2nd International Conference on
Conference_Location
Penang, Malaysia
Type
conf
DOI
10.1109/ICoBE.2015.7235900
Filename
7235900
Link To Document