Design, Simulation, and Characterization of a Low-Cost In-Plane Spark Gap Microswitch With Dual-Trigger Electrode for Pulsed Power Applications

An in-plane spark gap switch with dual-trigger electrode for pulsed power application has been designed and fabricated based on surface micromachining technology. The switch consists of two main electrodes and a dual-trigger electrode to achieve high peak current and smaller trigger voltage. The simulation result shows that 100-V trigger voltage could break down 30-μm distance and then start up the switch. The main discharge channel length has been set as 800 μm to get the optimized output of rise time combined with peak current. The prototype microswitch has been fabricated and characterized. The peak and rising edge of the discharge current are 3450.75 A and 164 ns, respectively, which well agree with simulation values.