• DocumentCode
    740091
  • Title

    Reply to “Comment on ‘A Compact Analytic Model of the Strain Field Induced by Through ilicon Vias”’

  • Author

    Sun-Rong Jan ; Tien-Pei Chou ; Che-Yu Yeh ; Chee Wee Liu ; Goldstein, Robert V. ; Gorodtsov, Valentin A. ; Shushpannikov, Pavel S.

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • Volume
    62
  • Issue
    9
  • fYear
    2015
  • Firstpage
    3106
  • Lastpage
    3106
  • Abstract
    The comment adds the results of 2 × 2 TSVs which is an extension of our 2-TSV case, and the clarification of no thermal strain effect on mobility. There are no contradictions with our original paper at all. Note that for the mobility calculation, the temperature dependence can be considered by the band parameters and phonon scattering [1].
  • Keywords
    three-dimensional integrated circuits; band parameters; compact analytic model; mobility calculation; phonon scattering; strain field; temperature dependence; through silicon vias; Analytical models; Electrical engineering; Photonics; Silicon; Strain; Stress; Thermal stresses;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2015.2464732
  • Filename
    7194787