Rolling Friction Model-Based Analyses and Compensation for Slow Settling Response in Precise Positioning

This paper presents rolling friction model-based analyses and compensation for slow settling responses in the precise positioning of linear motor-driven table systems. Rolling friction in the table drive mechanisms generates nonlinear elastic friction force in the micro displacement region. The nonlinear behavior causes slow responses at the settling region, deteriorating the fine positioning performance. Effects of the rolling friction on the positioning, therefore, should be analytically examined and compensated to provide the desired control performance. In this research, therefore, a rolling friction model-based analyses and compensation for the slow settling response are presented to improve the precise positioning performance. The proposed examinations and friction compensation for the slow settling response have been verified by numerical simulations and experiments using a prototype of table drive systems.