DocumentCode
745116
Title
Channel width dependence of NMOSFET hot carrier degradation
Author
Li, Erhong ; Prasad, Sharad
Author_Institution
Res. & Dev. Center, LSI Logic, Milpitas, CA, USA
Volume
50
Issue
6
fYear
2003
fDate
6/1/2003 12:00:00 AM
Firstpage
1545
Lastpage
1548
Abstract
The channel width dependence of hot carrier reliability on NMOSFETs from 0.4-μm to 0.13-μm technology has been studied at both Ib,peak and Vg = Vd conditions. Enhanced degradation on narrow width devices happens on most technologies. The Ib/Id value and vertical electric field are proposed to be the reasons for enhanced degradation on narrow width NMOSFETs.
Keywords
MOSFET; hot carriers; semiconductor device reliability; 0.4 to 0.13 micron; NMOSFET; channel width dependence; device degradation; hot carrier reliability; vertical electric field; Degradation; Electron traps; Hot carriers; Impact ionization; Isolation technology; MOSFET circuits; Stress; Testing; Threshold voltage; Transconductance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2003.813342
Filename
1213830
Link To Document