A new numerical and experimental analysis tool for ESD devices by means of the transient interferometric technique

Author

Reggiani, Susanna ; Gnani, Elena ; Rudan, Massimo ; Baccarani, Giorgio ; Bychikhin, Sergey ; Kuzmik, Jan ; Pogany, Dionyz ; Gornik, Erich ; Denison, Marie ; Jensen, Nils ; Groos, Gerhard ; Stecher, Matthias

Author_Institution

Dept. of Electron., Univ. of Bologna, Italy

Volume

26

Issue

12

fYear

2005

Firstpage

916

Lastpage

918

Abstract

Two different protection diodes are investigated with electrothermal simulation and transient interferometric thermal-mapping experiments in a new complementary approach. The prediction capability of the simulation tool is validated up to the thermal failure of the p-n junction. The temperature distribution and its dynamics during the application of high-current pulses are studied by comparing the calculated and experimental optical phase shifts: a quantitative agreement both in temporal evolution and space distribution of temperature is obtained up to 1100 K.

Keywords

electrostatic discharge; p-n junctions; phase shifting interferometry; semiconductor device models; semiconductor diodes; temperature distribution; transient analysis; electrostatic discharge devices; electrothermal effects; electrothermal simulation; high-current pulses; impact ionization; nonequilibrium Auger effect; optical phase shifts; p-n junction; prediction capability; protection diodes; semiconductor device modeling; temperature distribution; thermal failure; thermal mapping; thermo-optic effects; transient interferometric technique; Diodes; Electrostatic discharge; Electrostatic interference; Electrothermal effects; Optical interferometry; Phase shifting interferometry; Predictive models; Protection; Temperature distribution; Transient analysis; Electrostatic discharge (ESD); electrothermal effects; impact ionization; nonequilibrium Auger effect; semiconductor device modeling; thermal mapping; thermo-optic effects;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2005.859685

Filename

1546152