Title :
Continuous wave single transverse mode vertical-cavity surface-emitting lasers fabricated by helium implantation and zinc diffusion
Author :
Yang, Y. Jeffrey ; Bardin, T. ; Wang, Stanley C. ; Fernandez, Raul
Author_Institution :
Lockheed Palo Alto Res. Lab., CA, USA
Abstract :
A single transverse mode vertical-cavity surface emitting laser with moderate power has been fabricated using helium implantation and zinc diffusion. Devices with a 4 mu m diameter active region exhibited a fundamental transverse mode (TEM00) operation with a maximum continuous wave output power of 1.5 mW and a quantum efficiency as high as 70%.
Keywords :
diffusion in solids; helium; ion implantation; laser cavity resonators; optical workshop techniques; semiconductor doping; semiconductor junction lasers; zinc; 1.5 mW; 4 micron; 70 percent; AlAs:Zn-AlGaAs:Zn-GaAs:He; He implantation; VC-SEL; VCSEL; Zn diffusion; continuous wave; fabrication; fundamental transverse mode; moderate power; output power; quantum efficiency; semiconductor laser arrays; single transverse mode; vertical-cavity surface-emitting lasers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19920169
