DocumentCode
746329
Title
Physical model of threshold voltage in silicon MOS transistors including reverse short channel effect
Author
Brut, H. ; Juge, A. ; Ghibaudo, G.
Author_Institution
Central R&D, SGS-Thomson Microelectron., Crolles, France
Volume
31
Issue
5
fYear
1995
fDate
3/2/1995 12:00:00 AM
Firstpage
411
Lastpage
412
Abstract
A physically based model for the MOSFET threshold voltage accounting for the reverse short channel effect is proposed. This threshold voltage model which incorporates the inhomogeneous transverse and longitudinal doping profiles as well as the conventional charge sharing short channel effect, has been successfully tested on several submicronic technologies with various channel lengths
Keywords
MOSFET; doping profiles; semiconductor device models; 0.35 mum; 0.7 mum; MOS transistors; MOSFET; channel length; charge sharing short channel effect; inhomogeneous transverse doping profile; longitudinal doping profile; physical model; reverse short channel effect; submicronic technologies; threshold voltage;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19950233
Filename
370011
Link To Document