Title :
A 1-inch 2-M pixel HDTV CCD image sensor with tungsten photo-shield and H-CCD shunt wiring
Author :
Morimoto, Michihiro ; Orihara, Kozo ; Mutoh, Nobuhiko ; Toyoda, Arata ; Ohbo, Masahiro ; Kawakami, Yukiya ; Nakano, Takashi ; Chiba, Kazuhiro ; Kawai, Shigeaki ; Hatano, Keisuke ; Arai, Kouichi ; Nishimura, Miyo ; Nakashiba, Yasutaka ; Kohno, Akiyoshi ; A
Author_Institution :
NEC Corp., Sagamihara, Japan
fDate :
1/1/1995 12:00:00 AM
Abstract :
A 1-inch 2-million pixel FIT-CCD image sensor for HDTV has been developed, which features a tungsten photo-shield and horizontal CCD (H-CCD) shunt wiring. Tungsten photo-shield, which has low reflectance and good step coverage characteristics, reduces smear level to -110 dB, combined with a frame-interline-transfer (FIT) scheme. The tungsten photo-shield also acts as a shunt busline, supplying transfer pulses to vertical CCD (V-CCD) electrodes, so that a 1.2×10ˆ5 electron charge handling capability is obtained at a frame transfer frequency of 1 MHz. Newly developed H-CCD shunt wiring suppresses vertical line pair FPN, even with smaller transfer pulse amplitudes. H-CCD shunt wiring also helps reduce power consumption in the H-CCD by 2/3 as compared to that achieved with conventional wiring
Keywords :
CCD image sensors; high definition television; television cameras; tungsten; 1 MHz; 1 in; 2 Mpixel; FIT-CCD image sensor; H-CCD shunt wiring; HDTV CCD image sensor; W; W photo-shield; frame transfer frequency; frame-interline-transfer scheme; horizontal CCD shunt wiring; power consumption reduction; smear level reduction; Charge coupled devices; Charge-coupled image sensors; Electrodes; Electrons; HDTV; Image sensors; Pixel; Reflectivity; Tungsten; Wiring;
Journal_Title :
Electron Devices, IEEE Transactions on
