Title :
An Integrated Circuit Mask Fabrication Facility for Universities
Author :
Schwartz, R.J. ; Ozdemir, F.S. ; Ward, E.R.
Abstract :
A brief description of the construction of an inexpensive integrated circuit mask fabrication facility is presented along with comments on operating procedures that have been found useful.
Keywords :
Cameras; Contacts; Costs; Education; Educational institutions; Fabrication; Laboratories; Silicon; Solid state circuit design; Solid state circuits;
Journal_Title :
Education, IEEE Transactions on
DOI :
10.1109/TE.1971.4320681
