Title :
MEMS-based AC voltage reference
Author :
Kärkkäinen, Anu ; Pesonen, Nadine ; Suhonen, Mika ; Oja, Aarne S. ; Manninen, Antti ; Tisnek, Nikolai ; Seppä, Heikki
Author_Institution :
VTT Inf. Technol., Microsensing, Finland
fDate :
4/1/2005 12:00:00 AM
Abstract :
An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.
Keywords :
accelerometers; measurement standards; micromechanical devices; voltage measurement; 100 kHz; 24 hour; MEMS-based ac voltage reference; RMS voltage reference; accelerometer; capacitive sensors; device stability; microelectromechanical system; time stability; Electrodes; Frequency; Geometry; Microelectromechanical systems; Micromechanical devices; Silicon; Springs; Stability; Temperature; Voltage; AC voltage reference; capacitive sensors; microelectromechanical systems;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2004.843422
