Title :
Effect of Electrode Asymmetry on Performance of Electrohydrodynamic Micropumps
Author :
Kazemi, Pouya Zangeneh ; Selvaganapathy, Ponnambalam Ravi ; Ching, Chan Y.
Author_Institution :
Dept. of Mech. Eng., McMaster Univ., Hamilton, ON
fDate :
6/1/2009 12:00:00 AM
Abstract :
The effect of asymmetry in the electrode geometry and interelectrode spacing on the performance of ion-drag-type electrohydrodynamic micropumps was studied. The micropumps consisted of chromium/gold planar electrodes on a glass substrate that was integrated within a polydimethylsiloxane microchannel that was 100 mum in height. The pumps were tested using HFE-7100 as the working fluid for the maximum-pressure generation under a no-flow condition and the maximum flow rate under a no-back-pressure condition. The micropumps with an asymmetric-electrode design, where the emitter and collector electrode widths were different, generated a significantly higher pressure head and flow rate than the corresponding micropumps with symmetric-electrode designs for the same applied voltage. The power consumption of the pumps with asymmetric electrodes was significantly lower than that with symmetric electrodes.
Keywords :
electrohydrodynamics; micropumps; HFE-7100; chromium planar electrodes; electrode asymmetry; gold planar electrodes; interelectrode spacing; ion-drag-type electrohydrodynamic micropumps; polydimethylsiloxane microchannel; symmetric-electrode designs; Electrohydrodynamics; ion drag; microelectronic cooling; microfabrication; micropumps;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2009.2017084