Title :
Thick-film PZT-metallic triple beam resonator
Author :
Yan, T. ; Jones, B.E. ; Rakowski, R.T. ; Tudor, M.J. ; Beeby, S.P. ; White, N.M.
Author_Institution :
Brunel Centre for Manuf. Metrol., Brunel Univ., Uxbridge, UK
fDate :
6/26/2003 12:00:00 AM
Abstract :
A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical-etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5 mm long and 7 mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.
Keywords :
Q-factor; etching; lead compounds; micromechanical resonators; 15.5 mm; 6.2 kHz; 7 mm; PZT; Q-factor; double-sided photochemical-etching technique; metallic triple-beam resonator; resonator substrate; screen-printing process; thick-film piezoelectric elements;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030611
