Fabrication and Packaging of 40-Gb/s AlGaInAs Multiple-Quantum-Well Electroabsorption Modulated Lasers Based on Identical Epitaxial Layer Scheme

Author

Sun, Changzheng ; Xiong, Bing ; Wang, Jian ; Cai, Pengfei ; Xu, Jianming ; Huang, Jin ; Yuan, He ; Zhou, Qiwei ; Luo, Yi

Author_Institution

Dept. of Electron. Eng., Tsinghua Univ., Beijing

Volume

26

Issue

11

fYear

2008

fDate

6/1/2008 12:00:00 AM

Firstpage

1464

Lastpage

1471

Abstract

High-speed AlGaInAs multiple-quantum-well (MQW) electroabsorption modulated lasers (EMLs) based on an identical epitaxial layer (IEL) integration scheme are developed for 40-Gb/s optical fiber communication systems. A self-aligned planarization technique has been adopted to reduce the capacitance of the electroabsorption modulator (EAM). The IEL structure EML chips exhibit a small signal modulation bandwidth around 40 GHz. The influence of residual reflection at the modulator facet on the small signal modulation response is investigated. Submount containing a grounded coplanar waveguide (GCPW) transmission line is used for packaging the EML chips into transmitter modules. The optimization of the GCPW structure to suppress resonances in frequency response due to parallel-plate modes is presented. Clear eye opening under 40-Gb/s nonreturn-to-zero (NRZ) modulation has been demonstrated for the packaged EML module.

Keywords

III-V semiconductors; aluminium compounds; coplanar waveguide components; electro-optical modulation; gallium arsenide; gallium compounds; indium compounds; light reflection; optical fibre communication; optical transmitters; quantum well lasers; semiconductor quantum wells; transmission lines; AlGaInAs; bit rate 40 Gbit/s; coplanar waveguide transmission line; electroabsorption modulated lasers; electroabsorption modulator; frequency response; identical epitaxial layer scheme; multiple-quantum-well lasers; optical fiber communication; parallel-plate modes; residual reflection; self-aligned planarization; transmitter modules; Bandwidth; Capacitance; Epitaxial layers; Fiber lasers; IEL; Optical device fabrication; Optical fiber communication; Packaging; Planarization; Quantum well devices; 40 Gb/s; Distributed feedback (DFB) semiconductor laser; electroabsorption modulator (EAM); monolithic integration; packaging technology;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2008.922164

Filename

4542942