Title :
Gimbal-less MEMS two-axis optical scanner array with high fill-factor
Author :
Tsai, Jui-che ; Wu, Ming C.
Author_Institution :
Graduate Inst. of Electro-Opt. Eng., Nat. Taiwan Univ., Taiwan
Abstract :
In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1×N2 wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. [1496].
Keywords :
micromachining; micromechanical devices; micromirrors; optical arrays; optical scanners; 20.7 kHz; MEMS; SUMMiT-V; adaptive optics applications; fill factor; gimbal structures; mechanical scan angles; microelectromechanical devices; micromirror array; mirror structure; optical components; optical fiber switches; surface micromachining process; two axis optical scanner array; wavelength division multiplexing; wavelength selective switches; Adaptive arrays; Adaptive optics; Micromechanical devices; Mirrors; Optical arrays; Optical surface waves; Optical switches; Resonant frequency; Springs; Two dimensional displays; Microelectromechanical devices; micromirror array; optical components; optical fiber switches; wavelength division multiplexing (WDM); wavelength-selective switches;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2005.859193
