Gimbal-less MEMS two-axis optical scanner array with high fill-factor

Author

Tsai, Jui-che ; Wu, Ming C.

Author_Institution

Graduate Inst. of Electro-Opt. Eng., Nat. Taiwan Univ., Taiwan

Volume

14

Issue

6

fYear

2005

Firstpage

1323

Lastpage

1328

Abstract

In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1×N² wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. [1496].

Keywords

micromachining; micromechanical devices; micromirrors; optical arrays; optical scanners; 20.7 kHz; MEMS; SUMMiT-V; adaptive optics applications; fill factor; gimbal structures; mechanical scan angles; microelectromechanical devices; micromirror array; mirror structure; optical components; optical fiber switches; surface micromachining process; two axis optical scanner array; wavelength division multiplexing; wavelength selective switches; Adaptive arrays; Adaptive optics; Micromechanical devices; Mirrors; Optical arrays; Optical surface waves; Optical switches; Resonant frequency; Springs; Two dimensional displays; Microelectromechanical devices; micromirror array; optical components; optical fiber switches; wavelength division multiplexing (WDM); wavelength-selective switches;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2005.859193

Filename

1549866