DocumentCode
753244
Title
Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters
Author
Anders, André
Author_Institution
Lawrence Berkeley Nat. Lab., California Univ., Berkeley, CA, USA
Volume
30
Issue
1
fYear
2002
fDate
2/1/2002 12:00:00 AM
Firstpage
108
Lastpage
109
Abstract
Cathodic vacuum arc plasmas can be used to produce well-adherent, dense, high-quality films and coatings, provided macroparticles are removed from the plasma. Both plasma and macroparticles are produced at cathode spots, and in most cases both can easily be observed because they emit light. The nature of this light emission is briefly discussed. Using open, curved solenoids as magnetic filters, one can readily optically record the separation of plasma and macroparticles by the filter. Imaging can be used as a powerful tool to help developing macroparticle filters and optimizing their design
Keywords
plasma diagnostics; plasma impurities; separation; vacuum arcs; cathode spots; cathodic vacuum arc plasmas; coatings; curved magnetic filters; imaging; light emission; macroparticle filters; macroparticles; open curved solenoids; plasma filter; well-adherent dense high-quality films; Cathodes; Coatings; Magnetic films; Magnetic separation; Optical filters; Optical imaging; Plasma density; Solenoids; Stimulated emission; Vacuum arcs;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2002.1003947
Filename
1003947
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