• DocumentCode
    753244
  • Title

    Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters

  • Author

    Anders, André

  • Author_Institution
    Lawrence Berkeley Nat. Lab., California Univ., Berkeley, CA, USA
  • Volume
    30
  • Issue
    1
  • fYear
    2002
  • fDate
    2/1/2002 12:00:00 AM
  • Firstpage
    108
  • Lastpage
    109
  • Abstract
    Cathodic vacuum arc plasmas can be used to produce well-adherent, dense, high-quality films and coatings, provided macroparticles are removed from the plasma. Both plasma and macroparticles are produced at cathode spots, and in most cases both can easily be observed because they emit light. The nature of this light emission is briefly discussed. Using open, curved solenoids as magnetic filters, one can readily optically record the separation of plasma and macroparticles by the filter. Imaging can be used as a powerful tool to help developing macroparticle filters and optimizing their design
  • Keywords
    plasma diagnostics; plasma impurities; separation; vacuum arcs; cathode spots; cathodic vacuum arc plasmas; coatings; curved magnetic filters; imaging; light emission; macroparticle filters; macroparticles; open curved solenoids; plasma filter; well-adherent dense high-quality films; Cathodes; Coatings; Magnetic films; Magnetic separation; Optical filters; Optical imaging; Plasma density; Solenoids; Stimulated emission; Vacuum arcs;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2002.1003947
  • Filename
    1003947