Layout verification for mixed-domain integrated MEMS

As design of integrated microelectromechanical systems (MEMS) mature, there is an increasing need for verification tools for such mixed-domain layouts. This requires a mixed-domain layout-versus-schematic tool capable of extracting an integrated schematic from the mixed-domain layout and verifying it against the design schematic. This paper reports on a prototype implementation of such a tool and an extraction methodology for integrated MEMS designs capable of capturing domain-specific parasitics. A custom schematic-versus-schematic tool is then used to compare the parameters and connectivity of schematic elements between the extracted and design schematic. Finally, simulation of the extracted schematic is used to analyze the behavior of the designed layout.