Title :
Energy and angular distributions of ions and neutrals extracted from a slot in contact with a high-density plasma
Author :
Kim, Doosik ; Economou, Demetre J.
Author_Institution :
Dept. of Chem. Eng., Houston Univ., TX, USA
fDate :
2/1/2002 12:00:00 AM
Abstract :
The energy and angular distributions of ions and neutrals extracted from a two-dimensional slot in contact with a high-density Ar plasma were investigated. A combined fluid/Monte Carlo simulation was developed to follow the trajectories of ions and fast neutrals through the sheath and out the slot. The energy and angular distributions reflect the strong disturbance of the sheath when the slot size is comparable to the sheath thickness
Keywords :
Monte Carlo methods; argon; plasma sheaths; plasma simulation; plasma-wall interactions; Ar; angular distributions; energy distributions; fluid/Monte Carlo simulation; high-density Ar plasma; high-density plasma; ions; neutrals; sheath; slot; two-dimensional slot; Argon; Electric potential; Electrons; Plasma applications; Plasma density; Plasma sheaths; Plasma simulation; Plasma sources; Plasma temperature; Poisson equations;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003956
