DocumentCode
753338
Title
Energy and angular distributions of ions and neutrals extracted from a slot in contact with a high-density plasma
Author
Kim, Doosik ; Economou, Demetre J.
Author_Institution
Dept. of Chem. Eng., Houston Univ., TX, USA
Volume
30
Issue
1
fYear
2002
fDate
2/1/2002 12:00:00 AM
Firstpage
126
Lastpage
127
Abstract
The energy and angular distributions of ions and neutrals extracted from a two-dimensional slot in contact with a high-density Ar plasma were investigated. A combined fluid/Monte Carlo simulation was developed to follow the trajectories of ions and fast neutrals through the sheath and out the slot. The energy and angular distributions reflect the strong disturbance of the sheath when the slot size is comparable to the sheath thickness
Keywords
Monte Carlo methods; argon; plasma sheaths; plasma simulation; plasma-wall interactions; Ar; angular distributions; energy distributions; fluid/Monte Carlo simulation; high-density Ar plasma; high-density plasma; ions; neutrals; sheath; slot; two-dimensional slot; Argon; Electric potential; Electrons; Plasma applications; Plasma density; Plasma sheaths; Plasma simulation; Plasma sources; Plasma temperature; Poisson equations;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2002.1003956
Filename
1003956
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