DocumentCode :
753381
Title :
Three-dimensional fields and temperatures in a squat helicon reactor
Author :
Kinder, Ronald L. ; Kushner, Mark J.
Author_Institution :
Dept. of Nucl. Eng., Illinois Univ., Urbana, IL, USA
Volume :
30
Issue :
1
fYear :
2002
fDate :
2/1/2002 12:00:00 AM
Firstpage :
134
Lastpage :
135
Abstract :
Magnetically enhanced inductively coupled plasmas (MEICP) and helicons have complex plasma electric-field coupling between the electric field and the plasma due to the tensor conductivity and multiple-dimensional antenna segments. Computed three-dimensional electric fields and electron temperatures are presented for a helicon reactor demonstrating azimuthal asymmetries and rotations of the electric field. The electron temperature peaks near the axial antenna segments upstream and aligns with the azimuthal electric field downstream
Keywords :
antennas in plasma; plasma devices; plasma temperature; axial antenna segments; azimuthal asymmetry; azimuthal electric field; complex plasma electric-field coupling; electric field; electron temperature; helicon reactor; magnetically enhanced inductively coupled plasmas; multiple-dimensional antenna segments; squat helicon reactor; temperature; tensor conductivity; three-dimensional electric fields; three-dimensional fields; Antennas and propagation; Coils; Electrons; Inductors; Magnetic fields; Plasma applications; Plasma materials processing; Plasma properties; Plasma sources; Plasma temperature;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2002.1003960
Filename :
1003960
Link To Document :
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