Title :
Fully CMOS integrated low voltage 100 MHz MEMS resonator
Author :
Uranga, A. ; Teva, J. ; Verd, J. ; López, J.L. ; Torres, F. ; Esteve, J. ; Abadal, G. ; Pérez-Murano, F. ; Barniol, N.
Author_Institution :
Dept. of Electron. Eng., Univ. Autonoma de Barcelona, Spain
Abstract :
The development of a novel fully integrated microelectromechanical system (MEMS) for RF purposes is presented. It is composed of a paddle polysilicon micro-resonator electrostatically excited and a capacitive CMOS read-out amplifier. The micro-resonator is fabricated directly on a commercial CMOS technology, only requiring a wet etching process for the release of the resonant structure after the full CMOS integration. Electrical characterisation of the on-chip resonant device has been performed showing a resonance frequency near 100 MHz.
Keywords :
CMOS integrated circuits; etching; micromechanical resonators; radiofrequency amplifiers; radiofrequency integrated circuits; readout electronics; 100 MHz; CMOS integrated circuits; MEMS resonator; capacitive CMOS read-out amplifier; electrostatic devices; full CMOS integration; low-power electronics; microelectromechanical systems; micromechanical resonators; paddle polysilicon micro-resonators; radiofrequency amplifiers; radiofrequency integrated circuits; readout electronics; wet etching process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20053473
