Title :
Temperature selective deposition of Parylene-C
Author :
Charlson, E.M. ; Charlson, E.J. ; Sabeti, Roya
Author_Institution :
Dept. of Electr. & Comput. Eng., Missouri-Columbia Univ., MO, USA
Abstract :
A method for selectively depositing conformal, biocompatible coatings of Parylene-C on implantable integrated circuit structures is described. The technique consists of using thin film or diffused resistors to electrically heat the area where an opening in the Parylene is desired. Theoretically predicted and actual Parylene-C thicknesses are compared.
Keywords :
biomedical electronics; coating techniques; encapsulation; coating thickness; conformal biocompatible coatings; diffused resistors; electrical heating; implantable integrated circuit structures; medical implants; temperature selective deposition; thin film resistors; Application specific integrated circuits; Coatings; Dielectric liquids; Dielectrics and electrical insulation; Etching; Implants; Packaging; Plasma temperature; Protection; Resistors; Biomedical Engineering; Electric Conductivity; Electrochemistry; Electronics, Medical; Electroplating; Heat; Microscopy, Electron, Scanning; Polymers; Prostheses and Implants; Surface Properties; Temperature; Thermal Conductivity; Xylenes;
Journal_Title :
Biomedical Engineering, IEEE Transactions on
