Temperature selective deposition of Parylene-C

Author

Charlson, E.M. ; Charlson, E.J. ; Sabeti, Roya

Author_Institution

Dept. of Electr. & Comput. Eng., Missouri-Columbia Univ., MO, USA

Volume

39

Issue

2

fYear

1992

Firstpage

202

Lastpage

206

Abstract

A method for selectively depositing conformal, biocompatible coatings of Parylene-C on implantable integrated circuit structures is described. The technique consists of using thin film or diffused resistors to electrically heat the area where an opening in the Parylene is desired. Theoretically predicted and actual Parylene-C thicknesses are compared.

Keywords

biomedical electronics; coating techniques; encapsulation; coating thickness; conformal biocompatible coatings; diffused resistors; electrical heating; implantable integrated circuit structures; medical implants; temperature selective deposition; thin film resistors; Application specific integrated circuits; Coatings; Dielectric liquids; Dielectrics and electrical insulation; Etching; Implants; Packaging; Plasma temperature; Protection; Resistors; Biomedical Engineering; Electric Conductivity; Electrochemistry; Electronics, Medical; Electroplating; Heat; Microscopy, Electron, Scanning; Polymers; Prostheses and Implants; Surface Properties; Temperature; Thermal Conductivity; Xylenes;

fLanguage

English

Journal_Title

Biomedical Engineering, IEEE Transactions on

Publisher

ieee

ISSN

0018-9294

Type

jour

DOI

10.1109/10.121652

Filename

121652