Title :
Elastic surface wave devices based on piezoelectric thick-films
Author :
De Cicco, Giorgio ; Morten, Bruno ; Prudenziati, Maria
Author_Institution :
Dipartimento di Fisica, Modena Univ., Italy
Abstract :
A study has been performed for the development of elastic-waves structures, involving screen printed and fired piezoelectric layers on nonpiezoelectric substrates, intended for new families of thick film sensors. This study approached the electroacoustic effects, i.e., the coupling between electromechanical parameters of the layers and elastic properties of the substrate, related to the wave propagation. In this work, particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and antisymmetric) Lamb´s waves are generated. The realization processes and the performance characteristics of these structures are presented.
Keywords :
elastic waves; piezoelectric devices; piezoelectric thin films; surface acoustic wave devices; thick film devices; Al/sub 2/O/sub 3/; Lamb waves; SAW; alumina; elastic surface wave devices; electroacoustic effects; electromechanical parameters; nonpiezoelectric substrates; piezoelectric thick films; screen printed fired layers; thick film sensors; Biosensors; Electrodes; Ferroelectric materials; Piezoelectric devices; Piezoelectric materials; Sensor phenomena and characterization; Substrates; Surface acoustic waves; Surface waves; Thick film sensors;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on