DocumentCode
757916
Title
Capacitance estimate for electrostatically actuated narrow microbeams
Author
Batra, R.C. ; Porfiri, M. ; Spinello, D.
Author_Institution
Dept. of Eng. Sci. & Mech., State Univ., Virginia Polytech. Inst., VA
Volume
1
Issue
2
fYear
2006
fDate
12/1/2006 12:00:00 AM
Firstpage
71
Lastpage
73
Abstract
A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed. Parameters in the proposed formula are obtained by least square fitting data from a fully converged numerical solution with the method of moments. For a narrow microbeam, it is shown that the new formula significantly improves upon classical formulas that neglect fringing field effects due to the finite thickness of the microbeam cross-section
Keywords
beams (structures); capacitance measurement; micromechanical devices; capacitance; electrostatically actuated narrow microbeam; least square fitting data; line-to-ground capacitance; microbeam cross-section; pull-in instability parameters;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
Filename
4140873
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