DocumentCode
758167
Title
Analysis and simulation of anode heating due to electron field emission
Author
Fisher, Timothy S. ; Walker, D.G. ; Weller, Robert A.
Author_Institution
Birck Nanotechnology Center, Purdue Univ., West Lafayette, IN, USA
Volume
26
Issue
2
fYear
2003
fDate
6/1/2003 12:00:00 AM
Firstpage
317
Lastpage
323
Abstract
This paper considers the effect of anode heating from energetic electrons produced by field emission. Large electric fields accelerate emitted electrons as they traverse the vacuum gap toward the anode. Electron energy is transferred to the anode by collisions with the lattice. The nonequilibrium transfer of electron kinetic energy to anode thermal energy is examined quantitatively. Results demonstrate that the energy distribution of impinging electrons affects the transmission and dissipation of thermal energy. A Monte Carlo technique is used to resolve the thermalization of electrons and accounts for electron beam strength and spatial distribution. The results indicate that local heat fluxes of the order 10 kW/cm2 occur at the anode surface and that heating is a strong function of field strength because of the exponential relationship between applied voltage and current. Under practical conditions, temperature increases of 10°C are predicted from a single point emission source.
Keywords
Monte Carlo methods; anodes; electron field emission; vacuum microelectronics; Monte Carlo technique; anode heating; anode surface; anode thermal energy; electron beam strength; electron field emission; energy distribution; field strength; local heat fluxes; nonequilibrium transfer; single point emission source; spatial distribution; thermalization; vacuum gap; Acceleration; Analytical models; Anodes; Electron beams; Electron emission; Energy resolution; Heating; Kinetic energy; Lattices; Monte Carlo methods;
fLanguage
English
Journal_Title
Components and Packaging Technologies, IEEE Transactions on
Publisher
ieee
ISSN
1521-3331
Type
jour
DOI
10.1109/TCAPT.2003.815090
Filename
1218227
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