An electrochemical microactuator: principle and first results

Author

Neagu, Cristina R. ; Gardeniers, Johannes G E ; Elwenspoek, Miko ; Kelly, John J.

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

5

Issue

1

fYear

1996

fDate

3/1/1996 12:00:00 AM

Firstpage

2

Lastpage

9

Abstract

A novel electrochemical microactuator made with the use of silicon micromachining techniques, and its feasibility, are presented. Gas pressure is generated by electrolysis of an aqueous electrolyte solution. The pressure built up is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reverse the electrolysis reaction. The advantage of this type of actuation is a relatively large pressure generation with low energy consumption. Power is required only for pressure build-up and for changing the states. Therefore, this type of actuation has promising applications in pumps or active valves

Keywords

membranes; microactuators; micromachining; silicon; Si; Si micromachining techniques; aqueous electrolyte solution; electrochemical microactuator; electrolysis; gas pressure; low energy consumption; membrane deflection; Actuators; Biomembranes; Circuits; Electrochemical processes; Electrodes; Energy consumption; Microactuators; Micromachining; Silicon; Valves;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.485209

Filename

485209