Title :
Lithium niobate ridge waveguides fabricated by wet etching
Author :
Lee, H.J. ; Shin, S.-Y.
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fDate :
2/16/1995 12:00:00 AM
Abstract :
The authors report a novel method for fabricating proton exchanged LiNbO3 ridge waveguides by the wet etching of proton-exchanged LiNbO3. To demonstrate a simple and easy application of the LiNbO3 ridge waveguide, a Mach-Zehnder interferometric modulator with selfaligned electrode was fabricated
Keywords :
Mach-Zehnder interferometers; etching; ion exchange; lithium compounds; optical fabrication; optical modulation; optical planar waveguides; ridge waveguides; LiNbO3; Mach-Zehnder interferometric modulator; integrated optics; proton exchanged LiNbO3 waveguides; ridge waveguides; selfaligned electrode; wet etching;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950195