Fabrication of a mechanical antireflection switch for fiber-to-the-home systems

Author

Walker, James A. ; Goossen, Keith W. ; Arney, Susanne C.

Author_Institution

AT&T Bell Labs., Holmdel, NJ, USA

Volume

5

Issue

1

fYear

1996

fDate

3/1/1996 12:00:00 AM

Firstpage

45

Lastpage

51

Abstract

We present the methods used to fabricate a micromechanical silicon optical modulator for use in a fiber-to-the-home applications. We emphasize the efforts made to realize a practical, robust, manufacturable, and easily packaged device. In addition, recent speed, temperature stability, and reliability results are presented. Rise and fall times of 132 and 125 ns, respectively, have been observed in response to a square wave drive signal. The device has been temperature cycled from -50°C to 90°C and shown greater than 10-dB optical contrast ratio over this temperature range. Finally, the device has been cycled at 500 kHz for a period of nearly two months (two-trillion cycles) without a noticeable loss in performance

Keywords

antireflection coatings; micromechanical devices; optical fabrication; optical fibre subscriber loops; optical fibres; optical modulation; optical switches; -50 to 90 C; 125 to 132 ns; 2 month; 50 kHz; Si; fabrication; fiber-to-the-home systems; mechanical antireflection switch; micromechanical silicon optical modulator; optical contrast ratio; reliability; speed; temperature cycling; temperature stability; Manufacturing; Micromechanical devices; Optical device fabrication; Optical fiber devices; Optical modulation; Optical switches; Packaging; Robustness; Silicon; Temperature distribution;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.485215

Filename

485215