Title :
Fabrication of a mechanical antireflection switch for fiber-to-the-home systems
Author :
Walker, James A. ; Goossen, Keith W. ; Arney, Susanne C.
Author_Institution :
AT&T Bell Labs., Holmdel, NJ, USA
fDate :
3/1/1996 12:00:00 AM
Abstract :
We present the methods used to fabricate a micromechanical silicon optical modulator for use in a fiber-to-the-home applications. We emphasize the efforts made to realize a practical, robust, manufacturable, and easily packaged device. In addition, recent speed, temperature stability, and reliability results are presented. Rise and fall times of 132 and 125 ns, respectively, have been observed in response to a square wave drive signal. The device has been temperature cycled from -50°C to 90°C and shown greater than 10-dB optical contrast ratio over this temperature range. Finally, the device has been cycled at 500 kHz for a period of nearly two months (two-trillion cycles) without a noticeable loss in performance
Keywords :
antireflection coatings; micromechanical devices; optical fabrication; optical fibre subscriber loops; optical fibres; optical modulation; optical switches; -50 to 90 C; 125 to 132 ns; 2 month; 50 kHz; Si; fabrication; fiber-to-the-home systems; mechanical antireflection switch; micromechanical silicon optical modulator; optical contrast ratio; reliability; speed; temperature cycling; temperature stability; Manufacturing; Micromechanical devices; Optical device fabrication; Optical fiber devices; Optical modulation; Optical switches; Packaging; Robustness; Silicon; Temperature distribution;
Journal_Title :
Microelectromechanical Systems, Journal of
