DocumentCode
758819
Title
Plastic micromachining assisted by ultraviolet illumination
Author
Maleki, Teymour ; Mohajerzadeh, Shamsoddin ; Afzali-Kusha, Ali
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Tehran, Iran
Volume
50
Issue
8
fYear
2003
Firstpage
1813
Lastpage
1815
Abstract
A novel ultra-violet assisted micro-machining technique is presented in which the etching of Poly-Ethylene-Terephthalate substrates is anisotropic in the direction of light illumination in a Di-Methyl-Formamide solution. The effects of solution temperature and light intensity have been studied. An average etch rate of 10 μm/hr is achieved with insignificant mask undercut.
Keywords
etching; micromachining; plastics; Di-Methyl-Formamide solution; Poly-Ethylene-Terephthalate substrates; etch rate; light intensity; plastic micromachining; solution temperature; ultra-violet assisted micro-machining; ultraviolet illumination; Chemicals; Etching; Lighting; Micromachining; Plastics; Positron emission tomography; Solvents; Substrates; Temperature; Ultraviolet sources;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2003.815129
Filename
1218676
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