• DocumentCode
    759614
  • Title

    System control and management for low-cost high-volume GaAs manufacturing

  • Author

    Adams, Kevin M. ; Coe, Mary Ellen ; Della-Morrow, Celicia D. ; Flynn, Kevin P. ; Hertle, Jim ; Klingbeil, L. Scott, Jr. ; Ploeger, James B. ; Tebelak, Dawn C.

  • Author_Institution
    Semicond. Products Sector, Motorola Inc., Tempe, AZ, USA
  • Volume
    16
  • Issue
    3
  • fYear
    2003
  • Firstpage
    390
  • Lastpage
    398
  • Abstract
    With a portfolio consisting of Metal Semiconductor Field Effect Transistors (MESFET), Pseudomorphic High Electron Mobility Transistors (pHEMT), Heterojunction Insulated Gate Field Effect Transistors (HIGFET), and Indium Gallium Phosphide Heterojunction Bipolar Transistors (InGaP-HBT) technology, one factory has embarked on a mission to become a leader of cost and volume gallium arsenide (GaAs) manufacturing. Separate new product and new technology introduction systems have been developed and employed. Furthermore, several manufacturing and yield improvement systems, designed primarily for high-volume silicon factories, have been implemented. Additionally, a comprehensive cost-reduction project was implemented to bring wafer costs to benchmark levels.
  • Keywords
    HEMT integrated circuits; III-V semiconductors; MESFET integrated circuits; bipolar integrated circuits; gallium arsenide; heterojunction bipolar transistors; integrated circuit economics; integrated circuit manufacture; integrated circuit yield; statistical process control; technology management; technology transfer; GaAs; HBT; HIGFET; InGaP; MESFET; PHEMT; SPC system; cost-reduction project; low-cost high-volume GaAs manufacturing; management; system control; technology introduction systems; technology transfer; wafer costs; yield improvement systems; Control systems; Costs; FETs; Gallium arsenide; Heterojunction bipolar transistors; Manufacturing; PHEMTs; Production facilities; Semiconductor device manufacture; Silicon on insulator technology;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2003.815627
  • Filename
    1219484