Title :
System control and management for low-cost high-volume GaAs manufacturing
Author :
Adams, Kevin M. ; Coe, Mary Ellen ; Della-Morrow, Celicia D. ; Flynn, Kevin P. ; Hertle, Jim ; Klingbeil, L. Scott, Jr. ; Ploeger, James B. ; Tebelak, Dawn C.
Author_Institution :
Semicond. Products Sector, Motorola Inc., Tempe, AZ, USA
Abstract :
With a portfolio consisting of Metal Semiconductor Field Effect Transistors (MESFET), Pseudomorphic High Electron Mobility Transistors (pHEMT), Heterojunction Insulated Gate Field Effect Transistors (HIGFET), and Indium Gallium Phosphide Heterojunction Bipolar Transistors (InGaP-HBT) technology, one factory has embarked on a mission to become a leader of cost and volume gallium arsenide (GaAs) manufacturing. Separate new product and new technology introduction systems have been developed and employed. Furthermore, several manufacturing and yield improvement systems, designed primarily for high-volume silicon factories, have been implemented. Additionally, a comprehensive cost-reduction project was implemented to bring wafer costs to benchmark levels.
Keywords :
HEMT integrated circuits; III-V semiconductors; MESFET integrated circuits; bipolar integrated circuits; gallium arsenide; heterojunction bipolar transistors; integrated circuit economics; integrated circuit manufacture; integrated circuit yield; statistical process control; technology management; technology transfer; GaAs; HBT; HIGFET; InGaP; MESFET; PHEMT; SPC system; cost-reduction project; low-cost high-volume GaAs manufacturing; management; system control; technology introduction systems; technology transfer; wafer costs; yield improvement systems; Control systems; Costs; FETs; Gallium arsenide; Heterojunction bipolar transistors; Manufacturing; PHEMTs; Production facilities; Semiconductor device manufacture; Silicon on insulator technology;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2003.815627