DocumentCode
759614
Title
System control and management for low-cost high-volume GaAs manufacturing
Author
Adams, Kevin M. ; Coe, Mary Ellen ; Della-Morrow, Celicia D. ; Flynn, Kevin P. ; Hertle, Jim ; Klingbeil, L. Scott, Jr. ; Ploeger, James B. ; Tebelak, Dawn C.
Author_Institution
Semicond. Products Sector, Motorola Inc., Tempe, AZ, USA
Volume
16
Issue
3
fYear
2003
Firstpage
390
Lastpage
398
Abstract
With a portfolio consisting of Metal Semiconductor Field Effect Transistors (MESFET), Pseudomorphic High Electron Mobility Transistors (pHEMT), Heterojunction Insulated Gate Field Effect Transistors (HIGFET), and Indium Gallium Phosphide Heterojunction Bipolar Transistors (InGaP-HBT) technology, one factory has embarked on a mission to become a leader of cost and volume gallium arsenide (GaAs) manufacturing. Separate new product and new technology introduction systems have been developed and employed. Furthermore, several manufacturing and yield improvement systems, designed primarily for high-volume silicon factories, have been implemented. Additionally, a comprehensive cost-reduction project was implemented to bring wafer costs to benchmark levels.
Keywords
HEMT integrated circuits; III-V semiconductors; MESFET integrated circuits; bipolar integrated circuits; gallium arsenide; heterojunction bipolar transistors; integrated circuit economics; integrated circuit manufacture; integrated circuit yield; statistical process control; technology management; technology transfer; GaAs; HBT; HIGFET; InGaP; MESFET; PHEMT; SPC system; cost-reduction project; low-cost high-volume GaAs manufacturing; management; system control; technology introduction systems; technology transfer; wafer costs; yield improvement systems; Control systems; Costs; FETs; Gallium arsenide; Heterojunction bipolar transistors; Manufacturing; PHEMTs; Production facilities; Semiconductor device manufacture; Silicon on insulator technology;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2003.815627
Filename
1219484
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